JPH0346042B2 - - Google Patents

Info

Publication number
JPH0346042B2
JPH0346042B2 JP1577885A JP1577885A JPH0346042B2 JP H0346042 B2 JPH0346042 B2 JP H0346042B2 JP 1577885 A JP1577885 A JP 1577885A JP 1577885 A JP1577885 A JP 1577885A JP H0346042 B2 JPH0346042 B2 JP H0346042B2
Authority
JP
Japan
Prior art keywords
light
receiving element
signal
light receiving
dead zone
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1577885A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61175506A (ja
Inventor
Sadamitsu Nishihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Corp
Original Assignee
Mitutoyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Corp filed Critical Mitutoyo Corp
Priority to JP1577885A priority Critical patent/JPS61175506A/ja
Publication of JPS61175506A publication Critical patent/JPS61175506A/ja
Publication of JPH0346042B2 publication Critical patent/JPH0346042B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP1577885A 1985-01-30 1985-01-30 光電式測定機器における受光センサ−構造 Granted JPS61175506A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1577885A JPS61175506A (ja) 1985-01-30 1985-01-30 光電式測定機器における受光センサ−構造

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1577885A JPS61175506A (ja) 1985-01-30 1985-01-30 光電式測定機器における受光センサ−構造

Publications (2)

Publication Number Publication Date
JPS61175506A JPS61175506A (ja) 1986-08-07
JPH0346042B2 true JPH0346042B2 (en]) 1991-07-15

Family

ID=11898269

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1577885A Granted JPS61175506A (ja) 1985-01-30 1985-01-30 光電式測定機器における受光センサ−構造

Country Status (1)

Country Link
JP (1) JPS61175506A (en])

Also Published As

Publication number Publication date
JPS61175506A (ja) 1986-08-07

Similar Documents

Publication Publication Date Title
US4652765A (en) Edge detecting device in optical measuring instrument
EP0279347B1 (en) Optical axis displacement sensor
JPH0314124B2 (en])
US4652738A (en) Edge detecting device in optical measuring instrument
EP0234562B1 (en) Displacement sensor
US4436418A (en) Distance detector device
US4557602A (en) Edge detector in optical measuring instrument
JPH0346042B2 (en])
JPH04366718A (ja) 移動検出器
GB2161600A (en) An optical height measuring system for operation in a noisy environment
JPH0378561B2 (en])
JPH0412407Y2 (en])
JPS61120905A (ja) 光学式測定機器におけるエツジ検出装置
JPH0419482B2 (en])
JPH0733963B2 (ja) 拡大投影機
JPH0419481B2 (en])
JPS61213609A (ja) 光電式測定機器におけるエツジ検出装置
JP2961992B2 (ja) 光学像の境界検出装置
JPH0321841B2 (en])
JPS6324112A (ja) 投影画像のエツジ検出装置
RU1789046C (ru) Устройство дл измерени рассто ни
JPS63131011A (ja) 光学式エツジ検出装置
JPS62156515A (ja) 変位測定装置
KR970016815A (ko) 노광장치
JPH0331367B2 (en])

Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees